HAMAMATSU 滨松 EQ-77-QZ-S 激光驱动光源 (LDLS)
Parameter | Description / Value | Unit | ||
---|---|---|---|---|
Optical interface*1 | Diverging beam (Single beam) | - | ||
Wavelength range | 170 to 2500 | nm | ||
Plasma size (FWHM) | Typ. | 125 × 320 | μm | |
Numerical aperture | NA | 0.5 | - | |
Lifetime*2 | Typ. | 10 000 | h | |
Warm-up time | 30 | min | ||
Laser class | Class 1 | - | ||
Spectral radiance(at 500 nm) | Typ. | 75 | mW/mm2·sr·nm | |
Broadband optical power | Typ. | 2.75 | W | |
Output window size | Φ22 | mm | ||
Window material*3 | Quartz | - | ||
Cooling method | Water cooling*4*5 | - | ||
Nitrogen purge | Required. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG | - | ||
Applicable standards | EN 61010-1 EN 61326-1 IEC 60825-1 IEC 62471 EN 50581 | - | ||
Device configuration | Lamphead, Power supply controller, Remote control, Necessary cables | - | ||
Power rating | Input voltage (AC) | 100 to 240 | V | |
Power frequency | 50 / 60 | Hz | ||
Power consumption | 350 | W |
*1 Dual-beam output mode can be selected as an option. See page 4 for detailed information.
*2 Windows may need to be replaced depending on the extent of contamination and usage conditions.
*3 YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.
*4 Cooling water conditions Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure Controller: No cooling required
*5 A chiller kit is available as an option.
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